-
公开(公告)号：US12040156B2
公开(公告)日：2024-07-16
申请号：US17609693
申请日：2020-09-24
Inventor： Xuan Tang , Jingwei Shen
CPC classification number: H01J37/20 , H01J37/185 , H01J2237/2006 , H01J2237/204
Abstract: A sample protection device for a scanning electron microscope, the sample protection device comprising: a shell; an accommodating part having an accommodating space for accommodating a sample, the accommodating part being arranged in the shell in such a manner that the accommodating part can move relative to the shell, such that the accommodating part at least partially enters the shell or moves out of the shell; a sealing part connected to the accommodating part and configured to seal between the accommodating part and the shell when the accommodating part is at least partially accommodated in the shell; and a driving member configured to drive relative movement of the shell relative to the accommodating part.
Search Results
1
records
(took 0.041 seconds)
