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    Sample protection device for scanning electron microscopy
    1.
    发明授权
    Sample protection device for scanning electron microscopy 有权

    公开(公告)号：US12040156B2

    公开(公告)日：2024-07-16

    申请号：US17609693

    申请日：2020-09-24

    Applicant: SHANGHAI NEMOR OPTOELECTRONIC TECHNOLOGY CO., LTD

    Inventor： Xuan Tang ,  Jingwei Shen

    IPC: H01J37/20 ,  H01J37/18

    CPC classification number: H01J37/20 ,  H01J37/185 ,  H01J2237/2006 ,  H01J2237/204

    Abstract: A sample protection device for a scanning electron microscope, the sample protection device comprising: a shell; an accommodating part having an accommodating space for accommodating a sample, the accommodating part being arranged in the shell in such a manner that the accommodating part can move relative to the shell, such that the accommodating part at least partially enters the shell or moves out of the shell; a sealing part connected to the accommodating part and configured to seal between the accommodating part and the shell when the accommodating part is at least partially accommodated in the shell; and a driving member configured to drive relative movement of the shell relative to the accommodating part.

    RAPID TEM SAMPLE PREPARATION METHOD WITH BACKSIDE FIB MILLING
    4.
    发明申请
    RAPID TEM SAMPLE PREPARATION METHOD WITH BACKSIDE FIB MILLING 审中-公开
    具有背面FIB铣削的快速TEM样品制备方法

    公开(公告)号：US20160189929A1

    公开(公告)日：2016-06-30

    申请号：US14926648

    申请日：2015-10-29

    Applicant: Omniprobe, Inc.

    Inventor： Matt Hammer ,  Michael Dawson ,  Cheryl Hartfield

    IPC: H01J37/305 ,  H01J37/285

    CPC classification number: H01J37/3056 ,  G01N1/32 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: A method for TEM sample preparation with backside milling of a sample extracted from a workpiece in an energetic-beam instrument such as a FIB-SEM is disclosed. The method includes rotating a nanomanipulator probe tip holding an extracted sample by an angle calculated according to the geometry of the apparatus; moving the instrument stage to position a TEM grid in a fixed holder so that the plane of the TEM grid is substantially parallel to the required plane for the TEM sample; attaching the extracted sample to the TEM grid; and, tilting the stage by a stage-tilt angle, while maintaining the holder in the fixed orientation with respect to the stage, so that the axis of the ion beam is made substantially parallel to the required plane for the TEM sample; thereby placing the extracted sample into position for allowing backside milling to prepare a thinned cross-sectional sample for TEM viewing.

    Abstract translation: 公开了一种用于在诸如FIB-SEM的能量束仪器中从工件提取的样品的背面研磨的TEM样品制备方法。 该方法包括使保持提取的样品的纳米操纵器探针尖端旋转根据装置的几何形状计算的角度; 移动仪器台以将TEM格栅定位在固定夹具中，使得TEM网格的平面基本上平行于TEM样品的所需平面; 将提取的样品连接到TEM网格; 并且使台架相对于台架保持固定姿态，同时使台架倾斜角度，使得离子束的轴线基本上平行于TEM样品的所需平面; 从而将提取的样品置于适当位置，以允许背面研磨以制备用于TEM观察的变薄的横截面样品。

    Charged particle beam device
    7.
    发明授权
    Charged particle beam device 有权
    带电粒子束装置

    公开(公告)号：US09245710B2

    公开(公告)日：2016-01-26

    申请号：US14379694

    申请日：2013-02-20

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Kazuhiro Gunji ,  Yasushi Ebizuka ,  Yuta Asaga

    IPC: H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/28

    CPC classification number: H01J37/18 ,  H01J37/185 ,  H01J37/28 ,  H01J2237/18 ,  H01J2237/204 ,  H01J2237/28 ,  H01J2237/2801

    Abstract: A charged particle beam device that appropriately maintains a throughput of the device for each of specimens different in a gas emission volume from each other is provided. A scanning electron microscope includes an electron source, a specimen stage, a specimen chamber, and an exchange chamber, and further includes a vacuum gauge that measures an internal pressure of the exchange chamber, a time counting unit that counts time taken when a measurement result by the vacuum gauge has reached a predetermined degree of vacuum, and an integral control unit that performs comparative calculation and determination based on a measurement result by the time counting unit and integral control based on a process flow. And, the integral control unit controls changing of a content of a subsequent process based on a shift of the degree of vacuum of the exchange chamber.

    Abstract translation: 提供了一种带电粒子束装置，其适当地保持每个气体排放量彼此不同的样本的装置的生产量。 扫描电子显微镜包括电子源，试样台，试样室和交换室，还包括测量交换室的内部压力的真空计，计时单元，其计算测量结果所用的时间 通过真空计已经达到预定的真空度，以及积分控制单元，其基于通过时间计数单元的测量结果和基于处理流程的积分控制进行比较计算和确定。 并且，积分控制单元基于交换室的真空度的变化来控制后续处理的内容的变化。

    Device for analising a radiating material using a microprobe
    10.
    发明授权
    Device for analising a radiating material using a microprobe 有权
    使用微探针分析辐射材料的装置

    公开(公告)号：US09052272B2

    公开(公告)日：2015-06-09

    申请号：US14356332

    申请日：2012-11-15

    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

    Inventor： Jérôme Lamontagne ,  Thierry Blay ,  Philippe Benard

    IPC: G01Q10/04 ,  G01N23/22 ,  H01J37/18 ,  H01J37/252 ,  G01N23/225

    CPC classification number: G01N23/2204 ,  G01N23/2252 ,  H01J37/185 ,  H01J37/252 ,  H01J2237/184 ,  H01J2237/204

    Abstract: The invention relates to an analysis device comprising a main enclosure fitted with a secondary enclosure, a microprobe placed inside the main enclosure and fitted with an airlock and with a motion object, and a movable sample support that is movable from the secondary enclosure to the airlock and from the airlock to the motion object. Each of the airlock and the motion object includes a respective guide member for guiding the movable sample support and a respective sensor for detecting the presence of the movable sample support.

    Abstract translation: 本发明涉及一种分析装置，其包括装配有次级外壳的主外壳，放置在主外壳内部并配有气闸和运动物体的微探针以及可移动的样品支架，该可移动样品支架可从第二外壳移动到气闸 并从气闸到运动物体。 气闸和运动物体中的每一个包括用于引导可移动样品支撑件的相应引导构件和用于检测可移动样品支架的存在的相应传感器。

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