ELECTROWETTING DEVICE
    3.
    发明申请

    公开(公告)号:US20200078790A1

    公开(公告)日:2020-03-12

    申请号:US16563344

    申请日:2019-09-06

    IPC分类号: B01L3/00

    摘要: An electrowetting device includes a first substrate, a plurality of first electrodes formed on the first substrate, a dielectric layer formed on the plurality of first electrodes, a first water-repellent layer formed on the dielectric layer, a second substrate, a second electrode formed on the second substrate, and a second water-repellent layer formed on the second electrode. The first substrate and the second substrate are arranged with a gap between the first water-repellent layer and the second water-repellent layer. The first electrode includes an indium oxide-zinc oxide layer, the dielectric layer includes a silicon nitride layer, and the silicon nitride layer is formed directly on the indium oxide-zinc oxide layer.