公开(公告)号：US20110104517A1

公开(公告)日：2011-05-05

申请号：US12730228

申请日：2010-03-23

申请人： SHENG-CHI CHEN ,  Chih-Lung Shen ,  Ger-Pin Lin ,  Ta-Huang Sun ,  Tsung-Yen Kuo ,  Po-Cheng Kuo ,  Ching-Ray Chang

发明人： SHENG-CHI CHEN ,  Chih-Lung Shen ,  Ger-Pin Lin ,  Ta-Huang Sun ,  Tsung-Yen Kuo ,  Po-Cheng Kuo ,  Ching-Ray Chang

IPC分类号： G11B5/65 ,  G11B5/64

CPC分类号： G11B5/64 ,  G11B5/653 ,  G11B5/84 ,  G11B5/851

摘要： The present invention discloses a single-layered recording film with perpendicular magnetic anisotropy. The single-layered recording film includes a substrate and a ferromagnetic layer. The ferromagnetic layer is formed on the substrate and annealed by a rapid thermal annealing process. After annealing, the average grain size of the single-layered recording film is close to the film thickness of ferromagnetic layer, which is beneficial to achieve a single-layered recording film with perpendicular magnetic anisotropy.

摘要翻译： 本发明公开了具有垂直磁各向异性的单层记录膜。 单层记录膜包括基板和铁磁层。 铁磁层形成在基板上，并通过快速热退火工艺退火。 退火后，单层记录膜的平均粒径接近铁磁层的膜厚，有利于实现具有垂直磁各向异性的单层记录膜。