公开(公告)号：US20240347364A1

公开(公告)日：2024-10-17

申请号：US18754615

申请日：2024-06-26

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Rie ARAI ,  Yukinobu NISHIBE ,  Shun KATO ,  Shinji FUTATSUKAWA

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/67742 ,  H01L21/67023 ,  H01L21/67253 ,  H01L21/67772

Abstract: A substrate delivery apparatus and a substrate delivery method that can maintain a wet surface of a substrate and transport the substrate between processing devices are provided. A substrate delivery apparatus 2 of the present embodiment includes: a cart housing 210 having a housing room 211 that receives from outside and houses the substrate transportation cart 1 in which a tank 110 containing a plurality of substrates W and water is loaded; and a take-out device 250 that takes the substrate W out from the tank 110 loaded in the substrate transportation cart 1 housed in the housing room 211 and delivers the substrate W to the washing apparatus 3 that is the adjacent processing device.