公开(公告)号：US10421622B2

公开(公告)日：2019-09-24

申请号：US15856665

申请日：2017-12-28

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Yuichi Imaoka ,  Akinori Iso

IPC: B65G49/06 ,  B65G9/00 ,  B65G49/07 ,  H01L21/677 ,  C03C21/00 ,  B65G51/03

Abstract: According to one embodiment, a floating conveyor is configured to convey a substrate while floating the substrate. The floating conveyor includes a lower floating section and an upper floating section with a conveying path of the substrate therebetween. A plurality of floating blocks that constitute at least one of the lower floating section and the upper floating section are arranged to be separated by a space, and a floating block that constitutes the other is arranged to face the space.