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公开(公告)号：US10325787B2
公开(公告)日：2019-06-18
申请号：US14781077
申请日：2014-03-25
IPC分类号： B05D1/00 , B08B3/10 , H01L21/02 , H01L21/66 , H01L21/67 , H01L21/306 , H01L21/687
摘要： According to one embodiment, a substrate processing apparatus (1) includes: a support (4) configured to support a substrate (W) in a plane; a rotation mechanism (5) configured to rotate the support (4) about an axis that crosses a surface of the substrate (W) supported by the support (4) as a rotation axis; a plurality of nozzles (6a, 6b, 6c), which are aligned from the center toward the periphery of the substrate (W) supported by the support (4), configured to eject a treatment liquid to the surface of the substrate (W) on the support (4) being rotated by the rotation mechanism (5), and a controller (9) configured to control the nozzles to eject the treatment liquid at different ejection timings according to the thickness of a film of the treatment liquid formed on the surface of the substrate (W) on the support (4) being rotated by the rotation mechanism (5).
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公开(公告)号：US20200310183A1
公开(公告)日：2020-10-01
申请号：US16899767
申请日：2020-06-12
发明人： Yukinobu Nishibe , Akinori Iso , Keigo Oomori , Takashi Takahashi
IPC分类号： G02F1/1337 , F26B3/30 , F26B9/06 , F27D7/06
摘要： According to one embodiment, an organic film forming apparatus includes a chamber configured to maintain an atmosphere more reduced than an atmospheric pressure, at least one processing room provided inside the chamber and being surrounded by a cover, and an exhaust part configured to exhaust the inside the chamber. The processing room includes an upper heating part including first heaters, a lower heating part including second heaters, and facing the upper heating part, an upper heat equalizing plate provided on the lower heating part side of the upper heating part, a lower heat equalizing plate provided on the upper heating part side of the lower heating part, and workpiece supporters configured to support a workpiece through a gap between the upper and lower heat equalizing plates.
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公开(公告)号：US10421622B2
公开(公告)日：2019-09-24
申请号：US15856665
申请日：2017-12-28
发明人： Yuichi Imaoka , Akinori Iso
摘要： According to one embodiment, a floating conveyor is configured to convey a substrate while floating the substrate. The floating conveyor includes a lower floating section and an upper floating section with a conveying path of the substrate therebetween. A plurality of floating blocks that constitute at least one of the lower floating section and the upper floating section are arranged to be separated by a space, and a floating block that constitutes the other is arranged to face the space.
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公开(公告)号：US11906246B2
公开(公告)日：2024-02-20
申请号：US16899767
申请日：2020-06-12
发明人： Yukinobu Nishibe , Akinori Iso , Keigo Oomori , Takashi Takahashi
摘要： According to one embodiment, an organic film forming apparatus includes a chamber configured to maintain an atmosphere more reduced than an atmospheric pressure, at least one processing room provided inside the chamber and being surrounded by a cover, and an exhaust part configured to exhaust the inside the chamber. The processing room includes an upper heating part including first heaters, a lower heating part including second heaters, and facing the upper heating part, an upper heat equalizing plate provided on the lower heating part side of the upper heating part, a lower heat equalizing plate provided on the upper heating part side of the lower heating part, and workpiece supporters configured to support a workpiece through a gap between the upper and lower heat equalizing plates.
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