DEFECT DETECTION DEVICE
    2.
    发明公开

    公开(公告)号:US20230306575A1

    公开(公告)日:2023-09-28

    申请号:US18124225

    申请日:2023-03-21

    CPC classification number: G06T7/0004 G06T2200/24

    Abstract: A defect detection device includes: an excitation unit configured to apply vibration to an inspection object; a vibration state image creation unit configured to measure by an optical means a vibration state in a measurement area on a surface of the inspection object to which the vibration is applied, and to create one or more types of vibration state images representing the vibration state in the measurement area depending on a result of the measurement; an optical image acquisition unit configured to acquire an optical image in the measurement area; an image display unit configured to display an image; and a display control unit configured to perform control to simultaneously display two images among the one or more types of vibration state images and the optical image for the same area in the measurement area on the image display unit.

    DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD

    公开(公告)号:US20240230601A1

    公开(公告)日:2024-07-11

    申请号:US18290270

    申请日:2022-03-25

    CPC classification number: G01N29/2418 G01N29/041 G01N29/32 G01N2291/0289

    Abstract: A defect inspection apparatus (100) according to the present invention includes an exciter (1), an irradiator (laser illuminator 2) configured to irradiate an inspection target (8) with laser light, and a measurer (3) configured to change a phase of the laser light reflected by the inspection target (8) to cause the laser light having an unchanged phase to interfere with the laser light having a changed phase, and to measure the interference light. The measurer (3) is configured to acquire an interference image (71) representing a vibration state of the inspection target (8) as viewed in a direction extending along a first light path (21), and an interference image (72) representing a vibration state of the inspection target (8) as viewed in a direction extending along a second light path (22) in which the reflected laser light travels from the inspection target (8) in a direction different from the first light path (21).

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