公开(公告)号：US20160363544A1

公开(公告)日：2016-12-15

申请号：US14735112

申请日：2015-06-09

Applicant: SHIMADZU CORPORATION

Inventor： Yusuke TAGAWA ,  Hiroshi OOHARA ,  Yoshihiro UENO

IPC: G01N23/04 ,  G01T7/08

CPC classification number: G01N23/046 ,  G01T7/08

Abstract: In an X-ray inspecting apparatus, a rotational fluctuation amount of a stage is calculated around a power transmission part of the stage and a stage drive unit as a base point, i.e., the X-axis and Y-axis sliding parts, in accordance with detected positional information from a position detecting sensor. Then, a stage shift amount is calculated in accordance with the rotational fluctuation amount and a distance between the base point and an imaging position on the stage. Here, the stage shift amount corresponds to a positional deviation of the stage at the imaging position caused by an attitude variation of the stage in a yawing direction, and thus is an error in repeated positioning. Accordingly, a tomographic image with high resolution can be generated in consideration of the error in repeated positioning.

Abstract translation: 在X射线检查装置中，在台架的动力传递部分和作为基点的台架驱动单元（即，X轴和Y轴滑动部件）周围计算阶段的旋转变动量 检测来自位置检测传感器的位置信息。 然后，根据旋转变动量和基点与台面上的摄像位置之间的距离来计算舞台偏移量。 这里，舞台偏移量对应于由舞台在偏航方向上的姿态变化引起的成像位置处的舞台的位置偏差，因此是重复定位中的错误。 因此，考虑到重复定位中的误差，可以产生具有高分辨率的断层图像。