公开(公告)号：US20240085259A1

公开(公告)日：2024-03-14

申请号：US18241674

申请日：2023-09-01

Applicant: SHIMADZU CORPORATION

Inventor： Ryu TAKEBAYASHI ,  Shinya IMAMURA

IPC: G01L9/00 ,  G01N30/32

CPC classification number: G01L9/0041 ,  G01N30/32 ,  G01N2030/027 ,  G01N2030/326

Abstract: A sheet-like diaphragm made from a non-metallic material, a main body block made from a non-metallic material, having a diaphragm facing surface facing a main plane of the diaphragm, disposed in a manner that the diaphragm facing surface is covered by the diaphragm, and provided with a fluid outlet and a fluid inlet facing the diaphragm side, a sensor head that has a recess for accommodating pressure transmission liquid, is disposed on a side opposite to the main body block across the diaphragm such that an opening of the recess is closed by the diaphragm, and is configured to detect pressure of fluid flowing between the diaphragm and the diaphragm facing surface by a deformation amount of the diaphragm are included. The fluid inlet and the fluid outlet are provided in a manner separated from the diaphragm further than the diaphragm facing surface.