GAS SUPPLY APPARATUS AND GAS SUPPLY METHOD

    公开(公告)号:US20220251703A1

    公开(公告)日:2022-08-11

    申请号:US17725655

    申请日:2022-04-21

    Abstract: A gas supply method for supplying a gas compound obtained by vaporizing a liquid compound stored in a storage vessel to a target location through a gas compound supply pipeline, the gas supply method including adjusting a temperature of the liquid compound or the gas compound within the storage vessel to be equal to or lower than a surrounding temperature of the gas compound supply pipeline.

    GAS SUPPLY APPARATUS AND GAS SUPPLY METHOD
    6.
    发明申请

    公开(公告)号:US20190292660A1

    公开(公告)日:2019-09-26

    申请号:US16318645

    申请日:2017-07-11

    Abstract: Provided is a gas supply apparatus for supplying a gas compound obtained by vaporizing a liquid compound to a target location, the gas supply apparatus comprising: a storage vessel capable of storing the liquid compound; a gas compound supply pipeline, one end of which is connected to the storage vessel, and another end of which is capable of being disposed at the target location; and a temperature control device configured to adjust a temperature of the gas compound or the liquid compound within the storage vessel to be equal to or lower than a surrounding temperature of the gas compound supply pipeline.

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