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1.发明授权Method of obtaining purest semiconductor material by elimination of carbon-impurities 失效通过消除碳污染来获得纯化的半导体材料的方法
公开(公告)号：US3527661A
公开(公告)日：1970-09-08
申请号：US3527661D
申请日：1967-08-31
Applicant: SIEMENS AG
Inventor： SCHINK NORBERT , STOIBER RUPERT
IPC: C01B33/02
CPC classification number: C01B33/02 , C01B33/04 , C01B33/107
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