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公开(公告)号：US3607110A
公开(公告)日：1971-09-21
申请号：US3607110D
申请日：1968-03-11
Applicant: SIEMENS AG
Inventor： HAAS ERNST , MARTIN JOACHIM , REUSCHEL KONRAD , SCHINK NORBERT , VOGEL CARL-HEINZ
CPC classification number: C30B29/06 , C30B13/00 , Y10S117/90 , Y10T117/1076
Abstract: Apparatus comprising means for capturing carbon-containing vapor emanating from carbon-containing substances in the high vacuum environment and in the equipment for producing the high vacuum in the environment, and adsorbent means for adsorbing the carboncontaining vapor.
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2.发明授权Method of obtaining purest semiconductor material by elimination of carbon-impurities 失效通过消除碳污染来获得纯化的半导体材料的方法
公开(公告)号：US3527661A
公开(公告)日：1970-09-08
申请号：US3527661D
申请日：1967-08-31
Applicant: SIEMENS AG
Inventor： SCHINK NORBERT , STOIBER RUPERT
IPC: C01B33/02
CPC classification number: C01B33/02 , C01B33/04 , C01B33/107
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公开(公告)号：US3446653A
公开(公告)日：1969-05-27
申请号：US50031565
申请日：1965-10-21
Applicant: SIEMENS AG
Inventor： REUSCHEL KONRAD , SCHINK NORBERT
CPC classification number: C30B29/06 , C01B33/02 , C30B11/06 , C30B13/10 , C30B15/00 , H01L21/00 , Y10S148/016 , Y10S148/049 , Y10S148/06 , Y10S148/097 , Y10S148/107 , Y10S148/13
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