公开(公告)号：US20230172070A1

公开(公告)日：2023-06-01

申请号：US17987660

申请日：2022-11-15

Applicant: SII Crystal Technology Inc.

Inventor： Tomohiro MOMOSE

IPC: H01L41/047 ,  H01L41/113 ,  H01L41/09 ,  H01L41/293

CPC classification number: H01L41/0472 ,  H01L41/1132 ,  H01L41/094 ,  H01L41/293 ,  H03B5/32

Abstract: There are provided an excitation electrode, a quartz crystal vibrator element, a quartz crystal vibrator, a sensor, an oscillator, and a method of manufacturing a quartz crystal vibrator element which are not affected by heat in a process or a use environment to surely prevent a frequency fluctuation from occurring, reduction in size of which can be achieved, and which are low in cost and excellent in productivity. The excitation electrodes are disposed on an outer surface of a quartz crystal plate, apply an electrical field for exciting the quartz crystal plate to the quartz crystal plate, have a single layer structure formed of a two-dimensional layered substance, and are used when arranged as a pair so as to be opposed to each other via the quartz crystal plate.

公开(公告)号：US20220173717A1

公开(公告)日：2022-06-02

申请号：US17534913

申请日：2021-11-24

Applicant: SII Crystal Technology Inc.

Inventor： Takashi KOBAYASHI ,  Motoki SHIBUYA ,  Chisato OJIMA ,  Tomohiro MOMOSE

IPC: H03H9/19 ,  H03H3/04 ,  H03H9/05 ,  H03H9/10 ,  H03H9/13 ,  H03B5/32

Abstract: There is provided a piezoelectric vibrator element which is excellent in vibration characteristics, high in quality, and capable of suppressing a frequency fluctuation after a frequency adjustment. The piezoelectric vibrator element is provided with a piezoelectric plate having a pair of vibrating arm parts, an electrode film disposed on obverse and reverse surfaces of the piezoelectric plate, and weight metal films for a frequency adjustment disposed on the electrode film at the obverse surface side in the vibrating arm parts. The reverse surface of the vibrating arm part has a reverse side exposure part from which the piezoelectric plate is exposed. The obverse surface of the vibrating arm part has an obverse side exposure part from which the weight metal film and the electrode film are removed, and from which the piezoelectric plate is exposed. A whole of the obverse side exposure part overlaps the reverse side exposure part at a distance from the electrode film on the reverse surface viewed from a thickness direction of the piezoelectric plate.