公开(公告)号：US11831296B2

公开(公告)日：2023-11-28

申请号：US17534913

申请日：2021-11-24

Applicant: SII Crystal Technology Inc.

Inventor： Takashi Kobayashi ,  Motoki Shibuya ,  Chisato Ojima ,  Tomohiro Momose

IPC: H03B5/32 ,  H03H9/215 ,  H03H9/19 ,  H03H3/04 ,  H03H9/05 ,  H03H9/13 ,  H03H9/10

CPC classification number: H03H9/19 ,  H03B5/32 ,  H03H3/04 ,  H03H9/0595 ,  H03H9/105 ,  H03H9/132 ,  H03H9/215 ,  H03H2003/0428 ,  H03H2003/0442

Abstract: There is provided a piezoelectric vibrator element which is excellent in vibration characteristics, high in quality, and capable of suppressing a frequency fluctuation after a frequency adjustment. The piezoelectric vibrator element is provided with a piezoelectric plate having a pair of vibrating arm parts, an electrode film disposed on obverse and reverse surfaces of the piezoelectric plate, and weight metal films for a frequency adjustment disposed on the electrode film at the obverse surface side in the vibrating arm parts. The reverse surface of the vibrating arm part has a reverse side exposure part from which the piezoelectric plate is exposed. The obverse surface of the vibrating arm part has an obverse side exposure part from which the weight metal film and the electrode film are removed, and from which the piezoelectric plate is exposed. A whole of the obverse side exposure part overlaps the reverse side exposure part at a distance from the electrode film on the reverse surface viewed from a thickness direction of the piezoelectric plate.