公开(公告)号：US20230152341A1

公开(公告)日：2023-05-18

申请号：US18054278

申请日：2022-11-10

Applicant: SK hynix Inc.

Inventor： Chan Hyuk RHEE ,  Jong Hee YOO ,  Kee Jeung LEE

IPC: G01N35/04 ,  G01N1/04 ,  G01N35/00

CPC classification number: G01N35/04 ,  G01N1/04 ,  G01N35/00732

Abstract: A system for automating the processing of a sample for analysis includes a sample processing unit configured to manufacture a plurality of unit wafers by cutting an analysis target wafer and to manufacture a sample for analysis by applying at least one process to one of the plurality of unit wafers, a sample storage unit including a loading area having a plurality of reception holders, on which a unit wafer and the sample for analysis have been loaded, that are carried in and out, and a sample conveying unit configured to convey the analysis target wafer, the unit wafer, and the sample for analysis respectively between the sample processing unit and the sample storage unit.