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公开(公告)号:US20180277688A1
公开(公告)日:2018-09-27
申请号:US15709977
申请日:2017-09-20
Applicant: SK hynix Inc.
Inventor: Sun-Ha HWANG , Pyong-Su KWAG , Sang-Uk PARK , Kwang-Deok KIM , Ho-Ryeong LEE , Ju-Tae RYU
IPC: H01L29/94 , H01L49/02 , H01L27/146
CPC classification number: H01L29/94 , H01L23/5223 , H01L27/0805 , H01L27/14614 , H01L28/60 , H01L28/86
Abstract: A MOS capacitor may include: an isolation layer formed in a substrate and defining an active region; a first electrode formed in the active region, and including an impurity region spaced from the isolation layer; and a second electrode formed over the substrate overlapping the impurity region, and including a gate having a plurality of gate patterns adjacent to each other with a gap therebetween.