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1.发明授权Presumably defective portion decision apparatus, presumably defective portion decision method, fabrication method for semiconductor device and program 有权大概是缺陷部分决定装置，大概是缺陷部分决定方法，半导体装置和程序的制造方法公开(公告)号：US09435643B2
公开(公告)日：2016-09-06
申请号：US13754635
申请日：2013-01-30
Applicant: SONY CORPORATION
Inventor： Kyoko Izuha , Tatsushiro Hirata , Shunichi Shibuki
CPC classification number: G01B21/02 , H01L22/10 , H01L22/12 , H01L2924/0002 , H01L2924/00
Abstract: Disclosed herein is a presumably defective portion decision apparatus, including: an arithmetic operation section configured to divide a level difference included in level difference data which indicate a level difference distribution on the surface of a semiconductor device into two or more unit level differences in the depthwise direction of the level difference and determine, for each of the unit level differences obtained by the division, a relationship between the height of a contour line at a level difference position of an upper face and an area of an opening surrounded by the contour line to decide presence or absence of a presumably defective portion.
Abstract translation: 这里公开了一种可能的缺陷部分判定装置，包括：算术运算部，被配置为将表示半导体装置的表面上的电平差分布的电平差数据中包含的电平差分成深度方向的两个以上的单位电平差 方向的水平差，并且对于通过分割获得的每个单位水平差来确定上面的水平差位置处的轮廓线的高度与由轮廓线包围的开口的面积之间的关系， 决定存在或不存在可能有缺陷的部分。
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2.发明申请公开(公告)号：US20130196453A1
公开(公告)日：2013-08-01
申请号：US13754635
申请日：2013-01-30
Applicant: SONY CORPORATION
Inventor： Kyoko Izuha , Tatsushiro Hirata , Shunichi Shibuki
IPC: G01B21/02
CPC classification number: G01B21/02 , H01L22/10 , H01L22/12 , H01L2924/0002 , H01L2924/00
Abstract: Disclosed herein is a presumably defective portion decision apparatus, including: an arithmetic operation section configured to divide a level difference included in level difference data which indicate a level difference distribution on the surface of a semiconductor device into two or more unit level differences in the depthwise direction of the level difference and determine, for each of the unit level differences obtained by the division, a relationship between the height of a contour line at a level difference position of an upper face and an area of an opening surrounded by the contour line to decide presence or absence of a presumably defective portion.
Abstract translation: 这里公开了一种可能的缺陷部分判定装置，包括：算术运算部，被配置为将表示半导体装置的表面上的电平差分布的电平差数据中包含的电平差分成深度方向的两个以上的单位电平差 方向的水平差，并且对于通过分割获得的每个单位水平差来确定上面的水平差位置处的轮廓线的高度与由轮廓线包围的开口的面积之间的关系， 决定存在或不存在可能有缺陷的部分。
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