公开(公告)号：US11056379B2

公开(公告)日：2021-07-06

申请号：US14925715

申请日：2015-10-28

Applicant: SPTS TECHNOLOGIES LIMITED

Inventor： Anthony Barker ,  Huma Ashraf ,  Brian Kiernan

IPC: H01L21/687 ,  H01L21/67 ,  H01L21/3065 ,  H01J37/32

Abstract: A clamp assembly is for clamping an outer peripheral portion of a substrate to a support in a plasma processing chamber. An RF bias power is applied to the support during the plasma processing of the substrate. The clamp assembly includes an outer clamp member, and an inner clamp member which is received by the outer clamp member, the inner clamp member defining an aperture which exposes the substrate to the plasma processing. The outer clamp member has an inner portion terminating in an inner edge, wherein the inner portion is spaced apart from the inner clamp member.