公开(公告)号：US20190258049A1

公开(公告)日：2019-08-22

申请号：US16278149

申请日：2019-02-17

Applicant: STANLEY ELECTRIC CO., LTD.

Inventor： Makoto SAKURAI ,  Takaaki KOYAMA ,  Tomotaka ASARI

IPC: G02B26/08 ,  G02B26/10

Abstract: A light deflector 1 includes a reflector (2), inner piezoelectric actuators (4), an inner frame (5), outer piezoelectric actuators (6), and an outer frame (7). The reflector (2) is oscillated about a first axis Ua and a second axis Ub by the inner piezoelectric actuators (4) and the outer piezoelectric actuators (6), respectively. Formed on the rear surface of the light deflector 1 is a projecting rib (52), which projects from an encircling rib (51) of the inner frame (5) and reaches a corner portion (36) of a distal end portion of a piezoelectric cantilever (13a). A vertical side (22b) has an outer recess (35). The outer recess (35) extends along the projecting rib (52) in a portion of the distal end side of the piezoelectric cantilever (13a).

公开(公告)号：US20150143911A1

公开(公告)日：2015-05-28

申请号：US14549371

申请日：2014-11-20

Applicant: National University Corporation ,  STANLEY ELECTRIC CO., LTD.

Inventor： Kazuhiro TAKAHASHI ,  Chiharu SASAKI ,  Masanao TANI ,  Takaaki KOYAMA

IPC: G01N21/17 ,  G01N29/12

CPC classification number: G01N21/1702 ,  G01N2021/1708 ,  G01N2201/06113 ,  G01N2291/014 ,  G01N2291/023 ,  G01N2291/02809

Abstract: [Problems to be solved]A physical/chemical sensor that enables reduction of the size of the sensor and formation of arrays of the sensors is provided. The sensor can sense small change of surface stress and can measure mass of fixed specific substance. Also, a measuring method of the specific substance using the sensor is provided.[Means for solving problems]A physical/chemical sensor has a movable membrane (3) having a diaphragm structure provided to form a hollow section (2) between the movable membrane (3) and a light receiving surface of a light receiving element (1), a first piezoelectric membrane (4) that is provided on a front-side surface or a backside surface of the movable membrane (3) and that excites the movable membrane (3), and a second piezoelectric membrane (5) that is provided on the front-side surface or the backside surface of the movable membrane (3) and that senses a voltage caused by oscillation of the movable membrane (3). A measuring method using the physical/chemical sensor applies a voltage to the first piezoelectric membrane (4) while changing frequency and senses resonance frequency by sensing a voltage outputted from the second piezoelectric membrane (5).

Abstract translation: [待解决的问题]提供了能够减小传感器尺寸和形成传感器阵列的物理/化学传感器。 传感器可以感测到表面应力的小变化，并且可以测量固定的特定物质的质量。 另外，提供了使用该传感器的特定物质的测定方法。 解决问题的手段物理/化学传感器具有可移动膜（3），其具有设置成在可动膜（3）和受光元件（1）的光接收表面之间形成中空部分（2）的膜片结构 ），设置在可动膜（3）的前侧面或背面上并激励可动膜（3）的第一压电膜（4）和设置在可动膜 在可动膜（3）的前侧表面或背面上，并且感测由可动膜（3）的振荡引起的电压。 使用物理/化学传感器的测量方法在改变频率的同时，通过感测从第二压电膜（5）输出的电压来感测谐振频率，向第一压电膜（4）施加电压。