公开(公告)号：US09340023B2

公开(公告)日：2016-05-17

申请号：US13906447

申请日：2013-05-31

Applicant: STMICROELECTRONICS, INC.

Inventor： Paul I. Mikulan ,  Kenneth J. Stewart ,  Virgina L. Hwang

IPC: B41J2/16

CPC classification number: B41J2/1603 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1637 ,  B41J2/1639 ,  Y10T29/49083 ,  Y10T29/49087 ,  Y10T29/49401

Abstract: A method of making inkjet print heads may include forming a first wafer including a sacrificial substrate layer, and a first dielectric layer thereon having first openings therein defining inkjet orifices. The method may also include forming a second wafer having inkjet chambers defined thereon, and joining the first and second wafers together so that each inkjet orifice is aligned with a respective inkjet chamber. The method may further include removing the sacrificial substrate layer thereby defining the inkjet print heads.

Abstract translation: 制造喷墨打印头的方法可以包括形成包括牺牲基底层的第一晶片和其上具有限定喷墨孔的第一开口的第一介电层。 该方法还可以包括形成具有限定在其上的喷墨室的第二晶片，并且将第一和第二晶片接合在一起，使得每个喷墨孔与相应的喷墨室对准。 该方法还可以包括去除牺牲衬底层从而限定喷墨打印头。