公开(公告)号：US20130255381A1

公开(公告)日：2013-10-03

申请号：US13854782

申请日：2013-04-01

Applicant: STMICROELECTRONICS S.R.I.

Inventor： Giulio Ricotti ,  Alberto Pagani ,  Fulvio Vittorio Fontana ,  Ubaldo Mastromatteo

IPC: G01P15/105

CPC classification number: G01P15/11 ,  B81B7/008 ,  B81B2201/025 ,  B81B2207/012 ,  B81C1/0023 ,  G01C19/5783 ,  G01P15/0802 ,  G01P15/097 ,  G01P15/105 ,  H01L2224/16225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/00014

Abstract: An inertial sensor having a body with an excitation coil and a first sensing coil extending along a first axis. A suspended mass includes a magnetic-field concentrator, in a position corresponding to the excitation coil, and configured for displacing by inertia in a plane along the first axis. A supply and sensing circuit is electrically coupled to the excitation coil and to the first sensing coil, and is configured for generating a time-variable flow of electric current that flows in the excitation coil so as to generate a magnetic field that interacts with the magnetic-field concentrator to induce a voltage/current in the sensing coil. The integrated circuit is configured for measuring a value of the voltage/current induced in the first sensing coil so as to detect a quantity associated to the displacement of the suspended mass along the first axis.

Abstract translation: 惯性传感器，其具有带有激励线圈的主体和沿着第一轴线延伸的第一感测线圈。 悬挂质量体包括磁场集中器，位于对应于激励线圈的位置，并且构造成用于沿沿着第一轴线的平面中的惯性移位。 供电和感测电路电耦合到激励线圈和第一感测线圈，并且被配置为产生在励磁线圈中流动的时间流的电流，以便产生与磁场相互作用的磁场 感应线圈中的电压/电流。 集成电路被配置为测量在第一感测线圈中感应的电压/电流的值，以便检测与悬挂质量沿着第一轴的位移相关联的量。