公开(公告)号：US20220404150A1

公开(公告)日：2022-12-22

申请号：US17821724

申请日：2022-08-23

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro TOCCHIO ,  Luca Giuseppe FALORNI ,  Claudia COMI ,  Valentina ZEGA

IPC: G01C19/5747 ,  G01C19/574 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

公开(公告)号：US20180112981A1

公开(公告)日：2018-04-26

申请号：US15639608

申请日：2017-06-30

Applicant: STMICROELECTRONICS S.R.L. ,  Politecnico di Milano

Inventor： Alessandro TOCCHIO ,  Luca Giuseppe FALORNI ,  Claudia COMI ,  Valentina ZEGA

IPC: G01C19/5747 ,  G01C19/5769

CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

公开(公告)号：US20200096339A1

公开(公告)日：2020-03-26

申请号：US16697092

申请日：2019-11-26

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro TOCCHIO ,  Luca Giuseppe FALORNI ,  Claudia COMI ,  Valentina ZEGA

IPC: G01C19/5747 ,  G01C19/574 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.