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公开(公告)号：US20200096339A1
公开(公告)日：2020-03-26
申请号：US16697092
申请日：2019-11-26
IPC分类号： G01C19/5747 , G01C19/574 , G01C19/5769
摘要： A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.
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2.发明申请公开(公告)号：US20170108337A1
公开(公告)日：2017-04-20
申请号：US14964347
申请日：2015-12-09
IPC分类号： G01C19/5733
CPC分类号： G01C19/5733 , G01C19/5747 , G01C19/5762
摘要： A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.
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公开(公告)号：US20230036566A1
公开(公告)日：2023-02-02
申请号：US17868479
申请日：2022-07-19
IPC分类号： G01C19/5712
摘要： The MEMS gyroscope is formed by a substrate, a first mass and a second mass, wherein the first and the second masses are suspended over the substrate and extend, at rest, in a plane of extension defining a first direction and a second direction transverse to the first direction. The MEMS gyroscope further has a drive structure coupled to the first mass and configured, in use, to cause a movement of the first mass in the first direction, and an elastic coupling structure, which extends between the first mass and the second mass and is configured to couple the movement of the first mass in the first direction with a movement of the second mass in the second direction. The elastic coupling structure has a first portion having a first stiffness and a second portion having a second stiffness greater than the first stiffness.
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公开(公告)号：US20220404150A1
公开(公告)日：2022-12-22
申请号：US17821724
申请日：2022-08-23
IPC分类号： G01C19/5747 , G01C19/574 , G01C19/5769
摘要： A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.
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公开(公告)号：US20220380202A1
公开(公告)日：2022-12-01
申请号：US17744310
申请日：2022-05-13
摘要： A microelectromechanical device includes a substrate, a first structural layer, and a second structural layer of semiconductor material. A sensing mass extends in the first structural layer and is coupled to the substrate by first elastic connections to enable oscillation of the sensing mass in a sensing direction perpendicular to the substrate by a maximum amount relative to a resting position of the sensing mass. An out-of-plane stopper structure includes an anchorage fixed to the substrate and a mechanical end-of-travel structure, which extends in the second structural layer, faces the sensing mass, and is separated therefrom by a gap having a width smaller than the maximum displacement distance of the sensing mass. The mechanical end-of-travel structure is coupled to the anchorage by second elastic connections that enable movement of the mechanical end-of-travel structure in the sensing direction in response to an impact of the sensing mass.
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6.发明申请公开(公告)号：US20220252397A1
公开(公告)日：2022-08-11
申请号：US17728635
申请日：2022-04-25
IPC分类号： G01C19/5712 , B81B3/00 , G01C19/5755 , G01C19/574
摘要： The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.
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公开(公告)号：US20180112981A1
公开(公告)日：2018-04-26
申请号：US15639608
申请日：2017-06-30
IPC分类号： G01C19/5747 , G01C19/5769
CPC分类号： G01C19/5747 , G01C19/574 , G01C19/5769
摘要： A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.
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8.发明申请VIBRATING DEVICE FOR POSITIONING A MINIATURIZED PIECE IN A TESTING ACCOMMODATION, AND POSITIONING METHOD 有权用于在测试住宅中定位微型板的振动装置和定位方法公开(公告)号：US20140312925A1
公开(公告)日：2014-10-23
申请号：US14258911
申请日：2014-04-22
IPC分类号： G01R1/04
CPC分类号： G01R31/2887 , G01R1/0408 , G01R1/0483 , G01R31/2891 , G01R31/2893
摘要： An embodiment of a device for positioning a miniaturized piece, including: a positioning structure, which forms a first cavity, designed to receive with play the miniaturized piece, and a second cavity communicating with the first cavity; at least one electrical-contact terminal, facing the second cavity and electrically coupleable to an electronic testing device, designed to carry out an electrical test on the miniaturized piece; and an actuator device, which causes a vibration of the positioning structure, the vibration being such that the miniaturized piece translates, in use, towards the second cavity, until it penetrates at least in part into the second cavity.
摘要翻译： 一种用于定位小型化件的装置的实施例，包括：定位结构，其形成第一腔体，设计成用于放置小型化件接收，以及与第一腔体连通的第二腔室; 至少一个电接触端子，面向第二腔并电耦合到电子测试装置，设计用于对小型化件进行电测试; 以及致动器装置，其引起定位结构的振动，振动使得小型化件在使用中朝向第二腔平移，直到其至少部分地进入第二腔。
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公开(公告)号：US20220170745A1
公开(公告)日：2022-06-02
申请号：US17524609
申请日：2021-11-11
IPC分类号： G01C19/5712 , G01C25/00
摘要： A microelectromechanical gyroscope includes: the support structure; a sensing mass, coupled to the support structure with degrees of freedom along a driving direction and a sensing direction perpendicular to each other; and a calibration structure facing the sensing mass and separated from the sensing mass by a gap having an average width, the calibration structure being movable with respect to the sensing mass so that displacements of the calibration structure cause variations in the average width of the gap. A calibration actuator controls a relative position of the calibration structure with respect to the sensing mass and the average width of the gap.
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10.发明申请公开(公告)号：US20180106617A1
公开(公告)日：2018-04-19
申请号：US15858909
申请日：2017-12-29
IPC分类号： G01C19/5733 , G01C19/5762 , G01C19/5747
摘要： A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.
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