公开(公告)号：US20240043265A1

公开(公告)日：2024-02-08

申请号：US18359754

申请日：2023-07-26

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Giorgio ALLEGATO ,  Silvia NICOLI ,  Anna ALESSANDRI ,  Matteo GARAVAGLIA

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/0022 ,  B81C1/00269 ,  B81B2201/0228 ,  B81B2203/0315 ,  B81B2207/053 ,  B81C2203/0154 ,  B81C2203/0109 ,  B81C2203/038

Abstract: Electronic device including: a MEMS sensor device including a functional structure which transduces a chemical or physical quantity into a corresponding electrical quantity; a cap including a semiconductive substrate; and a bonding dielectric region, which mechanically couples the cap to the MEMS sensor device. The cap further includes a conductive region, which extends between the semiconductive substrate and the MEMS sensor device and includes: a first portion, which is arranged laterally with respect to the semiconductive substrate and is exposed, so as to be electrically coupleable to a terminal at a reference potential by a corresponding wire bonding; and a second portion, which contacts the semiconductive substrate.