公开(公告)号：US20230141388A1

公开(公告)日：2023-05-11

申请号：US17983972

申请日：2022-11-09

Applicant: STMicroelectronics (Crolles 2) SAS ,  STMicroelectronics SA

Inventor： Charlotte BEYLIER ,  Mauricio GARCIA SUAREZ ,  Pascal URARD ,  Guillaume LANDIE

IPC: G03F1/70 ,  G03F7/20

CPC classification number: G03F1/70 ,  G03F7/705

Abstract: The present description concerns a method that includes the compression, by a processor, of an image comprising first patterns by transforming the image into a first representation formed of two-point elements. The method also includes the execution, by a neural network, of an inference operation on the first representation to generate a second representation formed of two-point elements. The method further includes the generation of a lithographic mask based on the decompression of the second representation.