公开(公告)号：US20240295454A1

公开(公告)日：2024-09-05

申请号：US18117070

申请日：2023-03-03

Applicant: STMicroelectronics International N.V.

Inventor： Lorenzo BALDO ,  Filippo DANIELE ,  Enri DUQI

IPC: G01L9/12

CPC classification number: G01L9/12

Abstract: A pressure-sensor includes a substrate with a cavity therein and a membrane suspended over the cavity. The cavity is connected to external air pressure so a change in external air pressure causes out-of-plane movement of the membrane. A frame suspended over the membrane includes a segment connected to the membrane but disconnected from other frame portions. A projection extends from the frame. A first spring is connected to the projection, a second spring is connected to the segment, and an end portion connects the springs so out-of-plane movement of the membrane applies out-of-plane force to the second spring, which is transferred to the first spring by the end portion and translated to an in-plane force by the first spring and applied to the projection. This causes lateral sliding movement of the frame with respect to the substrate. A capacitive-sensor detects sliding movement of the frame with respect to the substrate.

公开(公告)号：US20240391760A1

公开(公告)日：2024-11-28

申请号：US18665062

申请日：2024-05-15

Applicant: STMicroelectronics International N.V.

Inventor： Silvia NICOLI ,  Giorgio ALLEGATO ,  Filippo DANIELE ,  Andrea NOMELLINI ,  Maria Carolina TURI

IPC: B81C1/00 ,  B81B3/00

Abstract: A MEMS pressure transducer includes a semiconductor body, a lower dielectric region arranged above the semiconductor body, and a fixed electrode region and a lower anchoring region, which are formed by conductive material, are arranged on the lower dielectric region and are laterally separated from each other. A membrane of conductive material is suspended above the fixed electrode region so as to delimit a cavity upwardly, the fixed electrode region facing the cavity, the membrane being deformable as a function of pressure and forming a variable capacitor together with the fixed electrode region. An upper anchoring region of conductive material laterally delimits the cavity and is interposed, in direct contact, between the membrane and the lower anchoring region.