公开(公告)号：US20240302219A1

公开(公告)日：2024-09-12

申请号：US18182058

申请日：2023-03-10

Applicant: STMicroelectronics International N.V.

Inventor： Federico VERCESI ,  Silvia NICOLI ,  Cinzia DE MARCO

IPC: G01K7/01 ,  H01L23/485 ,  H01L23/522

CPC classification number: G01K7/015 ,  H01L23/485 ,  H01L23/5226

Abstract: Disclosed herein are thermal sensor devices including TMOS devices with a mass suspended over a cavity by springs extending between a frame and the mass. The thermal sensor devices include stoppers that limit upward and/or downward movement of the springs and therefore the mass. These stoppers are formed from sidewalls supporting a top cap over the frame, springs, and mass. The stoppers are constructed by using various overlapping metal layers during fabrication. Details of forming the stoppers using these overlapping metal layers are contained here.

公开(公告)号：US20240426652A1

公开(公告)日：2024-12-26

申请号：US18742355

申请日：2024-06-13

Applicant: STMicroelectronics International N.V.

Inventor： Gianluca LONGONI ,  Luca SEGHIZZI ,  Francesco BIANCHI ,  Federico VERCESI ,  Andrea NOMELLINI ,  Silvia NICOLI

IPC: G01H11/08 ,  G01P15/08 ,  H04R1/08 ,  H04R7/04 ,  H04R7/18 ,  H04R17/02 ,  H04R31/00

Abstract: A microelectromechanical sensor assembly includes a semiconductor die having a scaled cavity. A microelectromechanical inertial sensor has a sensing mass. A piezoelectric vibration sensor has a piezoelectric membrane. The sensing mass and the piezoelectric membrane are stacked one on top of the other and housed in the sealed cavity.

公开(公告)号：US20240391760A1

公开(公告)日：2024-11-28

申请号：US18665062

申请日：2024-05-15

Applicant: STMicroelectronics International N.V.

Inventor： Silvia NICOLI ,  Giorgio ALLEGATO ,  Filippo DANIELE ,  Andrea NOMELLINI ,  Maria Carolina TURI

IPC: B81C1/00 ,  B81B3/00

Abstract: A MEMS pressure transducer includes a semiconductor body, a lower dielectric region arranged above the semiconductor body, and a fixed electrode region and a lower anchoring region, which are formed by conductive material, are arranged on the lower dielectric region and are laterally separated from each other. A membrane of conductive material is suspended above the fixed electrode region so as to delimit a cavity upwardly, the fixed electrode region facing the cavity, the membrane being deformable as a function of pressure and forming a variable capacitor together with the fixed electrode region. An upper anchoring region of conductive material laterally delimits the cavity and is interposed, in direct contact, between the membrane and the lower anchoring region.