公开(公告)号：US20240426868A1

公开(公告)日：2024-12-26

申请号：US18738990

申请日：2024-06-10

Applicant: STMicroelectronics International N.V.

Inventor： Francesco RIZZINI ,  Gabriele GATTERE

IPC: G01P15/125 ,  G01P21/00

Abstract: A MEMS sensor comprising a semiconductor body and a mass elastically coupled to the semiconductor body for oscillating with respect to the semiconductor body in a oscillation direction in response to a force acting on the mass in the oscillation direction, the force being caused by an acceleration applied to the MEMS sensor. The mass and the semiconductor body define at least one measurement structure with parallel-plate electrodes, which is configured to measure capacitively a position of the mass that is indicative of the acceleration applied to the MEMS sensor. The mass and the semiconductor body further define a calibration structure with comb-finger electrodes that is electrically controllable, in a calibration mode of the MEMS sensor, to bring about electrostatically a displacement of the mass with respect to the semiconductor body in the oscillation direction.