公开(公告)号：US09459447B2

公开(公告)日：2016-10-04

申请号：US14174367

申请日：2014-02-06

Applicant: STMicroelectronics International N.V.

Inventor： Moshe Medina ,  Pinchas Chaviv ,  Yaron Fein

IPC: G02B26/08 ,  B81C1/00 ,  H02N1/00

CPC classification number: G02B26/08 ,  B81C1/00603 ,  G02B26/0841 ,  H02N1/008

Abstract: An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 μm.

Abstract translation: 一种由绝缘层双层有源层绝缘体（DSOI）衬底形成的装置包括由绝缘层隔开的第一和第二有源层。 从基板形成静电梳驱动器，以包括由第一有源层形成的第一梳和由第二有源层形成的第二梳。 梳状驱动器可用于向微镜提供倾斜运动。 制造方法提供梳齿显示大于1:20的纵横比，第一和第二梳的梳齿之间的偏移距离小于约6μm。

公开(公告)号：US20140153074A1

公开(公告)日：2014-06-05

申请号：US14174367

申请日：2014-02-06

Applicant: STMicroelectronics International N.V.

Inventor： Moshe Medina ,  Pinchas Chaviv ,  Yaron Fein

IPC: G02B26/08

CPC classification number: G02B26/08 ,  B81C1/00603 ,  G02B26/0841 ,  H02N1/008

Abstract: An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 μm.

Abstract translation: 一种由绝缘层双层有源层绝缘体（DSOI）衬底形成的装置包括由绝缘层隔开的第一和第二有源层。 从基板形成静电梳驱动器，以包括由第一有源层形成的第一梳和由第二有源层形成的第二梳。 梳状驱动器可用于向微镜提供倾斜运动。 制造方法提供梳齿显示大于1:20的纵横比，第一和第二梳的梳齿之间的偏移距离小于约6μm。

公开(公告)号：US08693074B2

公开(公告)日：2014-04-08

申请号：US13663550

申请日：2012-10-30

Applicant: STMicroelectronics International N.V.

Inventor： Moshe Medina ,  Pinchas Chaviv ,  Yaron Fein

IPC: G02B26/08 ,  G03F7/00

CPC classification number: G02B26/08 ,  B81C1/00603 ,  G02B26/0841 ,  H02N1/008

Abstract: An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 μm.

Abstract translation: 一种由绝缘层双层有源层绝缘体（DSOI）衬底形成的装置包括由绝缘层隔开的第一和第二有源层。 从基板形成静电梳驱动器，以包括由第一有源层形成的第一梳和由第二有源层形成的第二梳。 梳状驱动器可用于向微镜提供倾斜运动。 制造方法提供梳齿显示大于1:20的纵横比，第一和第二梳的梳齿之间的偏移距离小于约6μm。

公开(公告)号：US20130050793A1

公开(公告)日：2013-02-28

申请号：US13663550

申请日：2012-10-30

Applicant: STMicroelectronics International N.V.

Inventor： Moshe Medina ,  Pinchas Chaviv ,  Yaron Fein

IPC: G02B26/08 ,  H05K13/00

CPC classification number: G02B26/08 ,  B81C1/00603 ,  G02B26/0841 ,  H02N1/008

Abstract: An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 μm.

Abstract translation: 一种由绝缘层双层有源层绝缘体（DSOI）衬底形成的装置包括由绝缘层隔开的第一和第二有源层。 从基板形成静电梳驱动器，以包括由第一有源层形成的第一梳和由第二有源层形成的第二梳。 梳状驱动器可用于向微镜提供倾斜运动。 制造方法提供梳齿显示大于1:20的纵横比，第一和第二梳的梳齿之间的偏移距离小于约6μm。