-
公开(公告)号：US20140252507A1
公开(公告)日：2014-09-11
申请号：US13785938
申请日：2013-03-05
发明人： Ravi Shankar , Olivier Le Neel , Shian Yeu Kam , Tien Choy Loh
CPC分类号： B81C1/00293 , B81B7/0041 , B81C2203/0136
摘要： Embodiments of the present disclosure are related to MEMS devices having a suspended membrane that are secured to and spaced apart from a substrate with a sealed cavity therebetween. The membrane includes openings with sidewalls that are closed by a dielectric material. In various embodiments, the cavity between the membrane and the substrate is formed by removing a sacrificial layer through the openings. In one or more embodiments, the openings in the membrane are closed by depositing the dielectric material on the sidewalls of the openings and the upper surface of the membrane.
摘要翻译： 本公开的实施例涉及具有悬置膜的MEMS器件，其被固定到衬底上并与衬底间隔开密封腔。 膜包括具有由介电材料封闭的侧壁的开口。 在各种实施例中，通过从开口去除牺牲层来形成膜与衬底之间的空腔。 在一个或多个实施例中，通过将介电材料沉积在开口的侧壁和膜的上表面上来封闭膜中的开口。
-
公开(公告)号：US10429330B2
公开(公告)日：2019-10-01
申请号：US15213230
申请日：2016-07-18
发明人： Olivier Le Neel , Ravi Shankar , Shian Yeu Kam , Tien Choy Loh
摘要： A miniature gas analyzer capable of detecting VOC gases in ambient air as well as sensing relative humidity and ambient temperature can be used to monitor indoor air quality. The VOC gas sensor is thermally controlled and can be tuned to detect a certain gas by programming an adjacent heater. An insulating air pocket formed below the sensor helps to maintain the VOC gas sensor at a desired temperature. A local temperature sensor may be integrated with each gas sensor to provide feedback control. The heater, local temperature sensor, gas sensor(s), relative humidity sensor, and ambient temperature sensor are in the form of patternable thin films integrated on a single microchip, e.g., an ASIC. The device can be incorporated into computer workstations, smart phones, clothing, or other wearable accessories to function as a personal air quality monitor that is smaller, more accurate, and less expensive than existing air quality sensors.
-
公开(公告)号：US09437798B2
公开(公告)日：2016-09-06
申请号：US13929525
申请日：2013-06-27
发明人： Olivier Le Neel , Suman Cherian , Calvin Leung , Ravi Shankar , Tien Choy Loh , Shian Yeu Kam
IPC分类号： G01N27/327 , H01L35/34
CPC分类号： H01L35/34 , G01N27/3274 , Y10T29/49117
摘要： A bio-fluid sensor is formed by depositing polyimide on a glass substrate. Gold and platinum are deposited on the polyimide and patterned to form fluid sensing electrodes, signal traces, and a temperature sensor. The fluid sensor is then fixed to a flexible tape and peeled off of the glass substrate.
摘要翻译： 通过在玻璃基板上沉积聚酰亚胺形成生物流体传感器。 金和铂沉积在聚酰亚胺上并图案化以形成流体感测电极，信号迹线和温度传感器。 然后将流体传感器固定到柔性带并从玻璃基板上剥离。
-
公开(公告)号：US20180017536A1
公开(公告)日：2018-01-18
申请号：US15213100
申请日：2016-07-18
发明人： Olivier Le Neel , Tien Choy Loh , Shian Yeu Kam , Ravi Shankar
CPC分类号： G01N33/004 , G01N25/22 , G01N33/0047
摘要： A microelectronic device capable of detecting multiple gas constituents in ambient air can be used to monitor air quality. The microelectronic air quality monitor includes a plurality of temperature-sensitive gas sensors tuned to detect different gas species. Each gas sensor is tuned by programming an adjacent heater. An insulating air pocket formed below the sensor helps to maintain the sensor at a desired temperature. A temperature sensor may also be integrated with each gas sensor to provide additional feedback control. The heater, temperature sensor, and gas sensors are in the form of patternable thin films integrated on a single microchip. The device can be incorporated into computer workstations, smart phones, clothing, or other wearable accessories to function as a personal air quality monitor that is smaller, more accurate, and less expensive than existing air quality sensors.
-
公开(公告)号：US20180017513A1
公开(公告)日：2018-01-18
申请号：US15213230
申请日：2016-07-18
发明人： Olivier Le Neel , Ravi Shankar , Shian Yeu Kam , Tien Choy Loh
CPC分类号： G01N27/128 , G01N33/0047
摘要： A miniature gas analyzer capable of detecting VOC gases in ambient air as well as sensing relative humidity and ambient temperature can be used to monitor indoor air quality. The VOC gas sensor is thermally controlled and can be tuned to detect a certain gas by programming an adjacent heater. An insulating air pocket formed below the sensor helps to maintain the VOC gas sensor at a desired temperature. A local temperature sensor may be integrated with each gas sensor to provide feedback control. The heater, local temperature sensor, gas sensor(s), relative humidity sensor, and ambient temperature sensor are in the form of patternable thin films integrated on a single microchip, e.g., an ASIC. The device can be incorporated into computer workstations, smart phones, clothing, or other wearable accessories to function as a personal air quality monitor that is smaller, more accurate, and less expensive than existing air quality sensors.
-
公开(公告)号：US20150001075A1
公开(公告)日：2015-01-01
申请号：US13929525
申请日：2013-06-27
发明人： Olivier Le Neel , Suman Cherian , Calvin Leung , Ravi Shankar , Tien Choy Loh , Shian Yeu Kam
IPC分类号： G01N27/416 , H01L35/34
CPC分类号： H01L35/34 , G01N27/3274 , Y10T29/49117
摘要： A bio-fluid sensor is formed by depositing polyimide on a glass substrate. Gold and platinum are deposited on the polyimide and patterned to form fluid sensing electrodes, signal traces, and a temperature sensor. The fluid sensor is then fixed to a flexible tape and peeled off of the glass substrate.
摘要翻译： 通过在玻璃基板上沉积聚酰亚胺形成生物流体传感器。 金和铂沉积在聚酰亚胺上并图案化以形成流体感测电极，信号迹线和温度传感器。 然后将流体传感器固定到柔性带并从玻璃基板上剥离。
-
公开(公告)号：US10254261B2
公开(公告)日：2019-04-09
申请号：US15213100
申请日：2016-07-18
发明人： Olivier Le Neel , Tien Choy Loh , Shian Yeu Kam , Ravi Shankar
摘要： A microelectronic device capable of detecting multiple gas constituents in ambient air can be used to monitor air quality. The microelectronic air quality monitor includes a plurality of temperature-sensitive gas sensors tuned to detect different gas species. Each gas sensor is tuned by programming an adjacent heater. An insulating air pocket formed below the sensor helps to maintain the sensor at a desired temperature. A temperature sensor may also be integrated with each gas sensor to provide additional feedback control. The heater, temperature sensor, and gas sensors are in the form of patternable thin films integrated on a single microchip. The device can be incorporated into computer workstations, smart phones, clothing, or other wearable accessories to function as a personal air quality monitor that is smaller, more accurate, and less expensive than existing air quality sensors.
-
公开(公告)号：US09013012B2
公开(公告)日：2015-04-21
申请号：US13785938
申请日：2013-03-05
发明人： Ravi Shankar , Olivier Le Neel , Shian Yeu Kam , Tien Choy Loh
CPC分类号： B81C1/00293 , B81B7/0041 , B81C2203/0136
摘要： Embodiments of the present disclosure are related to MEMS devices having a suspended membrane that are secured to and spaced apart from a substrate with a sealed cavity therebetween. The membrane includes openings with sidewalls that are closed by a dielectric material. In various embodiments, the cavity between the membrane and the substrate is formed by removing a sacrificial layer through the openings. In one or more embodiments, the openings in the membrane are closed by depositing the dielectric material on the sidewalls of the openings and the upper surface of the membrane.
摘要翻译： 本公开的实施例涉及具有悬置膜的MEMS器件，其被固定到衬底上并与衬底间隔开密封腔。 膜包括具有由介电材料封闭的侧壁的开口。 在各种实施例中，通过从开口去除牺牲层来形成膜与衬底之间的空腔。 在一个或多个实施例中，通过将介电材料沉积在开口的侧壁和膜的上表面上来封闭膜中的开口。
-
-
-
-
-
-
-
搜索结果
8 条记录 (耗时 0.013 秒)
