公开(公告)号：US10809280B2

公开(公告)日：2020-10-20

申请号：US16116467

申请日：2018-08-29

Applicant: STMicroelectronics S.r.l.

Inventor： Alessandro Tocchio ,  Francesco Rizzini ,  Carlo Valzasina ,  Giacomo Langfelder ,  Cristiano Rocco Marra

IPC: G01P15/125 ,  G01C19/5719 ,  G01P15/08 ,  G01P15/18 ,  G01P15/097

Abstract: An inertial sensor for sensing an external acceleration includes: a first and a second proof mass; a first and a second capacitor formed between first and second fixed electrodes and the first proof mass; a third and a fourth capacitor formed between third and fourth fixed electrodes and the second proof mass; a driving assembly configured to cause an antiphase oscillation of the first and second proof masses; a biasing circuit configured to bias the first and third capacitors, thus generating first variation of the oscillation frequency in a first time interval, and to bias the second and fourth capacitors, thus generating first variation of the oscillation frequency in a second time interval; a sensing assembly, configured to generate an differential output signal which is a function of a difference between a value of the oscillating frequency during the first time interval and a value of the oscillating frequency during the second time interval. Such differential output signal can be correlated to the value and direction of the external acceleration.