公开(公告)号：US20190115524A1

公开(公告)日：2019-04-18

申请号：US16215821

申请日：2018-12-11

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna BEVILACQUA ,  Flavio Francesco VILLA ,  Rossana SCALDAFERRI ,  Valeria CASUSCELLI ,  Andrea DI MATTEO ,  Dino FARALLI

IPC: H01L41/113 ,  H02N2/18 ,  H01L41/22 ,  H01L41/047 ,  H01L41/053 ,  H01L41/29 ,  H01L41/25 ,  H01L41/187 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US20220246832A1

公开(公告)日：2022-08-04

申请号：US17722713

申请日：2022-04-18

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna BEVILACQUA ,  Flavio Francesco VILLA ,  Rossana SCALDAFERRI ,  Valeria CASUSCELLI ,  Andrea DI MATTEO ,  Dino FARALLI

IPC: H01L41/113 ,  H01L41/047 ,  H01L41/22 ,  H02N2/18 ,  H01L41/053 ,  H01L41/187 ,  H01L41/25 ,  H01L41/29 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.