公开(公告)号：US20190115524A1

公开(公告)日：2019-04-18

申请号：US16215821

申请日：2018-12-11

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna BEVILACQUA ,  Flavio Francesco VILLA ,  Rossana SCALDAFERRI ,  Valeria CASUSCELLI ,  Andrea DI MATTEO ,  Dino FARALLI

IPC: H01L41/113 ,  H02N2/18 ,  H01L41/22 ,  H01L41/047 ,  H01L41/053 ,  H01L41/29 ,  H01L41/25 ,  H01L41/187 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US20220246832A1

公开(公告)日：2022-08-04

申请号：US17722713

申请日：2022-04-18

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna BEVILACQUA ,  Flavio Francesco VILLA ,  Rossana SCALDAFERRI ,  Valeria CASUSCELLI ,  Andrea DI MATTEO ,  Dino FARALLI

IPC: H01L41/113 ,  H01L41/047 ,  H01L41/22 ,  H02N2/18 ,  H01L41/053 ,  H01L41/187 ,  H01L41/25 ,  H01L41/29 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US20180178251A1

公开(公告)日：2018-06-28

申请号：US15626824

申请日：2017-06-19

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Francesco FONCELLINO ,  Flavio Francesco VILLA ,  Andrea DI MATTEO

IPC: B06B1/06 ,  H01L41/113 ,  B06B1/02 ,  H01L41/293 ,  H01L41/332

CPC classification number: B06B1/0622 ,  B06B1/0207 ,  B06B1/06 ,  G01H11/08 ,  G10K9/122 ,  G10K13/00 ,  H01L41/1138 ,  H01L41/293 ,  H01L41/332

Abstract: A piezoelectric micro-machined ultrasonic transducer (PMUT) comprising: a semiconductor body having a first cavity and a membrane, which is suspended over the first cavity and faces a front side of the semiconductor body; and a piezoelectric transducer assembly extending at least in part on the membrane, which may be actuated for generating a deflection of the membrane. A second cavity extends buried in a peripheral region of the membrane and delimits a central region of the membrane. Moreover, the peripheral portion has a stiffness lower than the stiffness of the central portion.