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公开(公告)号：US10288874B2
公开(公告)日：2019-05-14
申请号：US15293061
申请日：2016-10-13
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Sebastiano Conti , Sonia Constantini
IPC: G02B26/08 , H04N5/225 , G02B26/10 , H04N13/211 , H04N13/236 , H04N13/254 , G01B11/25 , G03B21/00
Abstract: A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.
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Patent Agency Ranking
公开(公告)号：US09835850B2
公开(公告)日：2017-12-05
申请号：US14961507
申请日：2015-12-07
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Sebastiano Conti , Sonia Constantini
CPC classification number: G02B26/0833 , G01B11/2518 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/105 , G03B21/008 , H04N5/2254 , H04N5/2256 , H04N5/2257 , H04N13/211 , H04N13/236 , H04N13/254 , Y10T29/49
Abstract: A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.
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公开(公告)号：US20160094831A1
公开(公告)日：2016-03-31
申请号：US14961507
申请日：2015-12-07
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Sebastiano Conti , Sonia Constantini
CPC classification number: G02B26/0833 , G01B11/2518 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/105 , G03B21/008 , H04N5/2254 , H04N5/2256 , H04N5/2257 , H04N13/211 , H04N13/236 , H04N13/254 , Y10T29/49
Abstract: A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.
Abstract translation: 镜面微机械结构具有携带镜子元件的移动质量。 质量可旋转驱动，以反射具有期望角度范围的入射光束。 移动块悬挂在支撑体中获得的空腔上方。 空腔的形状使得支撑体不会将反射的光束阻碍在期望的角度范围内。 特别地，腔延伸到反射镜微机械结构的支撑体的第一侧边缘壁。 腔体在第一侧边缘壁处朝着反射镜微机械结构的外部打开并且与其连通。
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公开(公告)号：US10310253B2
公开(公告)日：2019-06-04
申请号：US15594287
申请日：2017-05-12
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Domenico Giusti , Sonia Constantini
Abstract: A MEMS device includes a fixed structure and suspended structure including an internal structure and a first arm and a second arm. Each arm has a first end fixed to the fixed structure and a second end fixed to the internal structure. The ends are angularly arranged at a distance apart. Piezoelectric actuators mounted to the arms are driven so as to cause deformation of the arm and produce a rotation of the internal structure. In a resting condition, each of the first and second arms has a respective elongated portion with a respective concavity. The internal structure extends in part within the concavities of the elongated portions of the first and second arms.
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5.发明申请公开(公告)号：US20180180873A1
公开(公告)日：2018-06-28
申请号：US15594287
申请日：2017-05-12
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Domenico Giusti , Sonia Constantini
CPC classification number: G02B26/0858 , B81B3/0083 , B81B2201/032 , B81B2203/0118 , G02B26/105 , H04N9/3129
Abstract: A MEMS device includes a fixed structure and suspended structure including an internal structure and a first arm and a second arm. Each arm has a first end fixed to the fixed structure and a second end fixed to the internal structure. The ends are angularly arranged at a distance apart. Piezoelectric actuators mounted to the arms are driven so as to cause deformation of the arm and produce a rotation of the internal structure. In a resting condition, each of the first and second arms has a respective elongated portion with a respective concavity. The internal structure extends in part within the concavities of the elongated portions of the first and second arms.
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公开(公告)号：US20170031153A1
公开(公告)日：2017-02-02
申请号：US15293061
申请日：2016-10-13
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Sebastiano Conti , Sonia Constantini
CPC classification number: G02B26/0833 , G01B11/2518 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/105 , G03B21/008 , H04N5/2254 , H04N5/2256 , H04N5/2257 , H04N13/211 , H04N13/236 , H04N13/254 , Y10T29/49
Abstract: A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.
Abstract translation: 镜面微机械结构具有携带镜子元件的移动质量。 质量可旋转驱动，以反射具有期望角度范围的入射光束。 移动块悬挂在支撑体中获得的空腔上方。 空腔的形状使得支撑体不会将反射的光束阻碍在期望的角度范围内。 特别地，腔延伸到反射镜微机械结构的支撑体的第一侧边缘壁。 腔体在第一侧边缘壁处朝着反射镜微机械结构的外部打开并且与其连通。
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