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公开(公告)号:US09874813B2
公开(公告)日:2018-01-23
申请号:US14698904
申请日:2015-04-29
发明人: Yuma Tanaka
CPC分类号: G03F7/0236 , G03F7/0045 , G03F7/0047 , G03F7/0226 , G03F7/0233 , G03F7/038 , H05K3/287 , H05K2201/0989
摘要: A photosensitive resin material of the invention is a photosensitive resin material used to form a permanent film including one or more selected from a novolac-type phenol resin, a phenol aralkyl resin, and a hydroxystyrene resin as an alkali-soluble resin (A) and a photosensitive diazoquinone compound as a photosensitizing agent (B), in which a content of iron with respect to all non-volatile components, which is measured through flameless atomic absorption spectroscopy, is equal to or more than 0.005 ppm and equal to or less than 80 ppm, and non-ionic iron is included as the iron.