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公开(公告)号：US11629796B2
公开(公告)日：2023-04-18
申请号：US17545685
申请日：2021-12-08
发明人： Emmanuel Vyers
IPC分类号： F16K51/02 , F16K3/02 , F16K41/10 , F16K49/00 , F16K31/50 , F16K3/18 , F16K31/04 , F16K31/528
摘要： A vacuum valve includes a valve plate that covers an exhaust port of a vacuum chamber, and a poppet type actuator that drives the valve plate in an axial direction orthogonal to a surface of the vacuum chamber on which the exhaust port is provided. The actuator includes a shaft that is connected to the valve plate, a drive unit that is disposed side by side with the shaft in a radial direction of the shaft and includes a ball screw shaft and a drive source that rotates the ball screw shaft, and a connection part that connects the ball screw shaft and the shaft and moves in the axial direction together with the shaft to a position where the valve plate covers the exhaust port.
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公开(公告)号：US20220099218A1
公开(公告)日：2022-03-31
申请号：US17545685
申请日：2021-12-08
发明人： Emmanuel Vyers
IPC分类号： F16K51/02 , F16K31/04 , F16K3/18 , F16K31/528 , F16K3/02
摘要： A vacuum valve includes a valve plate that covers an exhaust port of a vacuum chamber, and a poppet type actuator that drives the valve plate in an axial direction orthogonal to a surface of the vacuum chamber on which the exhaust port is provided. The actuator includes a shaft that is connected to the valve plate, a drive unit that is disposed side by side with the shaft in a radial direction of the shaft and includes a ball screw shaft and a drive source that rotates the ball screw shaft, and a connection part that connects the ball screw shaft and the shaft and moves in the axial direction together with the shaft to a position where the valve plate covers the exhaust port.
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