Optical Waveguide Device and Method of Manufacturing the Same
    1.
    发明申请
    Optical Waveguide Device and Method of Manufacturing the Same 审中-公开
    光波导装置及其制造方法

    公开(公告)号:US20130084036A1

    公开(公告)日:2013-04-04

    申请号:US13630193

    申请日:2012-09-28

    CPC classification number: G02F1/035 Y10T156/1002

    Abstract: An optical waveguide device using a thin substrate having an electro-optical effect and having a thickness of 10 μm or less, in which, even when the thin substrate is adhered to a supporting substrate, breakage of the thin substrate or supporting substrate is suppressed, and performance deterioration such as optical loss due to fine cracks is also suppressed. The optical waveguide device includes a thin substrate, which has an electro-optical effect and a thickness of 10 μm or less, and in which an optical waveguide is formed, and a supporting substrate that is adhered to the thin substrate through an adhesion layer. A structure is formed in a thin-substrate side surface of the supporting substrate, and the supporting substrate is annealed at a high temperature that is equal to or lower than the Curie temperature after forming the concavo-convex structure and before being adhered to the thin substrate.

    Abstract translation: 使用具有电光效应并且具有10μm以下的厚度的薄基板的光波导装置,其中即使当薄基板粘附到支撑基板上时,也抑制了薄基板或支撑基板的断裂, 并且也抑制了由细裂纹引起的光学损失等性能劣化。 光波导装置包括具有电光效应和10μm以下的厚度的薄基板,其中形成有光波导,并且通过粘合层粘附到薄基板上的支撑基板。 在支撑基板的薄基板侧表面上形成结构,并且在形成凹凸结构之后并且在粘附到薄板之前,在等于或低于居里温度的高温下对支撑基板进行退火 基质。

    OPTICAL CONTROL ELEMENT
    2.
    发明申请

    公开(公告)号:US20190302491A1

    公开(公告)日:2019-10-03

    申请号:US16367762

    申请日:2019-03-28

    Abstract: An optical control element including an optical waveguide formed by using diffusion of titanium that is formed on a lithium niobate substrate and a control electrode formed on the lithium niobate substrate that is provided in the vicinity of the optical waveguide, in which an amount of a hydroxyl group absorbed into the lithium niobate substrate is set to be in a range of 0.5 to 2.5 cm−1.

    Optical Waveguide Device
    4.
    发明申请
    Optical Waveguide Device 有权
    光波导器件

    公开(公告)号:US20130084038A1

    公开(公告)日:2013-04-04

    申请号:US13630659

    申请日:2012-09-28

    Abstract: An optical waveguide device that uses a thin substrate having an electro-optical effect and a thickness of 10 μm or less, in which slab propagation light that is reflected from an end face of the device is removed and thus deterioration in an operational characteristic is suppressed. The optical waveguide device includes: a thin substrate which has an electro-optical effect and thickness of 10 μm or less, and in which an optical waveguide is formed; and a supporting substrate that is adhered to the thin substrate through an adhesion layer. An antireflective film is formed on a part of a side surface of the optical waveguide device.

    Abstract translation: 使用具有电光效应和厚度为10μm以下的薄基板的光波导装置,其中从装置的端面反射的板状传播光被去除,从而抑制了操作特性的劣化 。 光波导装置包括:具有电光效应,10μm以下的厚度的薄基板,形成有光波导; 以及通过粘合层粘附到薄基板的支撑基板。 在光波导器件的侧面的一部分上形成防反射膜。

    OPTICAL WAVEGUIDE ELEMENT
    5.
    发明申请

    公开(公告)号:US20210096402A1

    公开(公告)日:2021-04-01

    申请号:US17043407

    申请日:2019-01-24

    Abstract: Provided is an optical waveguide element capable of connection such as wire bonding, suppressing usage of gold, and suppressing deterioration of a conductor loss. An optical waveguide element includes a substrate 1 having an electro-optic effect, an optical waveguide 2 formed on the substrate, and a control electrode (30, 31) provided on the substrate and controlling a light wave propagating through the optical waveguide. The control electrode is made of a material other than gold, and the gold is disposed on at least a wire bonding portion 4 of the control electrode.

    WAVEGUIDE TYPE OPTICAL ELEMENT
    6.
    发明申请

    公开(公告)号:US20180011348A1

    公开(公告)日:2018-01-11

    申请号:US15516196

    申请日:2016-03-24

    Abstract: To effectively prevent the acceleration of the drift phenomenon generated by the application of a high electric field to a substrate through a bias electrode in a waveguide type optical element. A waveguide type optical element includes a substrate (100) having an electro-optic effect, two optical waveguides (104 and 106) disposed on a surface of the substrate, a non-conductive layer (120) which is disposed on the substrate and is made of a material having a lower dielectric constant than the substrate, and a control electrode (150) which is disposed on the non-conductive layer and is intended to generate a refractive index difference between the two optical waveguides by respectively applying electric fields to the two optical waveguides, and the non-conductive layer is constituted of a material which includes silicon oxide, an oxide of indium, and an oxide of titanium and has a ratio between a molar concentration of the titanium oxide and a molar concentration of indium oxide of 1.2 or more, and a voltage generating an electric field of 1 V/μm or more in the substrate is applied to the control electrode.

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