公开(公告)号：US11148258B2

公开(公告)日：2021-10-19

申请号：US16420993

申请日：2019-05-23

申请人： SUSS MicroTec Lithography GmbH

发明人： Thomas Grund ,  Rainer Targus

IPC分类号： B25B11/00 ,  H01L21/683

摘要： A holding apparatus, in particular a chuck, for a substrate comprises a main body with a upper side, a carrier element arranged in a recess of the main body so as to be vertically movable such that it can be adjusted between a protruding loading position and a retracted clamping position, the carrier element comprising a support surface for placement of the substrate. The support surface has a smaller diameter than the main body. A lifting element lifts the carrier element to the loading position. The carrier element seals the recess such that a sealed cavity is provided between the main body and the carrier element, which cavity can have a negative pressure applied thereto which counteracts the effect of the lifting element.

公开(公告)号：US11504825B2

公开(公告)日：2022-11-22

申请号：US17466413

申请日：2021-09-03

申请人： SUSS MicroTec Lithography GmbH

发明人： Thomas Grund ,  Rainer Targus

IPC分类号： B25B11/00 ,  H01L21/683

摘要： A holding apparatus, in particular a chuck, for a substrate comprises a main body with a upper side, a carrier element arranged in a recess of the main body so as to be vertically movable such that it can be adjusted between a protruding loading position and a retracted clamping position, the carrier element comprising a support surface for placement of the substrate. The support surface has a smaller diameter than the main body. A lifting element lifts the carrier element to the loading position. The carrier element seals the recess such that a sealed cavity is provided between the main body and the carrier element, which cavity can have a negative pressure applied thereto which counteracts the effect of the lifting element.

公开(公告)号：US10953415B2

公开(公告)日：2021-03-23

申请号：US16013481

申请日：2018-06-20

申请人： SUSS MicroTec Lithography GmbH

发明人： Thomas Grund ,  Gary Choquette ,  Kader Mekias

IPC分类号： B05B15/62 ,  B05B1/28 ,  B05C5/02 ,  B05B15/65 ,  B05B1/30 ,  H01L21/67 ,  B05C17/01

摘要： A nozzle tip adapter has a suction duct, a supply duct, and a base body with a device end and a substrate end. The base body has a nozzle tip recess at its substrate end for receiving a nozzle tip and a projecting portion extending into the nozzle tip recess, wherein the suction duct extends through the projecting portion and the supply duct opens into the nozzle tip recess, wherein the suction duct is being at least partially surrounded by the supply duct. Further, a nozzle assembly and a nozzle are disclosed.