公开(公告)号：US11990361B2

公开(公告)日：2024-05-21

申请号：US17365990

申请日：2021-07-01

Applicant: Samsung Display Co., LTD.

Inventor： Hee Sun Jang ,  Tae Hun Kim ,  Do Hwan Kim ,  Jae Han Kim ,  Seung Ho Myoung ,  Dae Young Oh ,  Gyeong Hee Han

IPC: H01L21/683 ,  H10K71/00 ,  H10K50/11 ,  H10K50/844 ,  H10K59/12

CPC classification number: H01L21/6833 ,  H10K71/00 ,  H10K50/11 ,  H10K50/844 ,  H10K59/12 ,  H10K59/1201

Abstract: The chuck for supporting a target substrate for a display device, the chuck includes: a base having a first surface to support an object and a second surface opposite the first surface, the first surface including a first area and a second area; and indentations formed in the second area and recessed from the first area in a thickness direction of the base. The indentations include a first indentation extending in a first direction and a second indentation extending in a second direction intersecting the first direction.