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公开(公告)号:US11744120B2
公开(公告)日:2023-08-29
申请号:US17212046
申请日:2021-03-25
Applicant: Samsung Display Co., LTD.
Inventor: Hyun Min Cho , Tae Sung Kim , Yun Jong Yeo , Ji Youn Nam , Hee Min Yoo
IPC: H01L27/32 , H01L51/56 , H10K59/124 , H10K59/122 , H10K59/123 , H10K71/00 , H10K59/12
CPC classification number: H10K59/124 , H10K59/122 , H10K59/123 , H10K71/00 , H10K59/1201
Abstract: A manufacturing method of a display device includes: forming a transistor on a substrate; forming an organic insulating layer on the transistor; and performing a plasma treatment on the organic insulating layer. The organic insulating layer includes an acryl-based polymer, and the plasma treatment is performed by using helium gas or argon gas.