公开(公告)号：US20240139911A1

公开(公告)日：2024-05-02

申请号：US18384141

申请日：2023-10-26

Applicant: Samsung Display Co., LTD.

Inventor： JUNHEE BAE ,  JINSOO SHIN ,  HYUNHEE LEE ,  SEUNGPYO HONG

IPC: B24D3/20 ,  B24D3/34

CPC classification number: B24D3/20 ,  B24D3/34

Abstract: A polishing apparatus includes a shank including a rotation shaft extending in a first direction, a first cushion unit covering a side surface of the shank and having a first hardness, a first film unit adjacent to the first cushion unit in a second direction crossing the first direction and covering a side surface of the first cushion unit, a second cushion unit disposed below the shank, having a second hardness different from the first hardness, and including a first part and a second part. The first part has a cylindrical shape and the second part is disposed below the first part and has a conical shape protruding in a direction opposite to the first part, and a second film unit covering the second part.