公开(公告)号：US10773427B2

公开(公告)日：2020-09-15

申请号：US15652184

申请日：2017-07-17

Applicant: Samsung Display Co., Ltd.

Inventor： Daehwan Jang ,  Seung-Won Park ,  Baehyoun Jung ,  Eunjung Kim ,  Jihun Kim ,  Yunjong Yeo ,  Hyungbin Cho ,  Sang-Hoon Lee ,  Yong-Hwan Ryu ,  Sung-Young Choi ,  Hyunju Kang

IPC: B29C33/42 ,  B29C33/38 ,  G03F7/00 ,  B29C35/08 ,  B29C59/04

Abstract: A method of manufacturing a roll type imprint master mold including disposing a base layer on a substrate including a first area and a second area adjacent to the first area, disposing an inorganic insulation layer on the base layer, forming a first mask pattern and a first resin pattern in the first area, forming a pattern layer by etching the inorganic insulation layer using the first resin and the first mask patterns as a mask, removing the first resin and the first mask patterns, forming a second mask pattern and a second resin pattern in the second area, forming a pattern layer by etching the inorganic insulation layer using the second resin and the second mask patterns as a mask, removing the second resin and the second mask patterns, separating the base layer from the substrate, and attaching the base layer onto a roll body.