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公开(公告)号：US20230189625A1
公开(公告)日：2023-06-15
申请号：US18079966
申请日：2022-12-13
Applicant: Samsung Display Co., Ltd.
Inventor： Myungkyu KIM , Changkon PARK , Sukbeom YOU , Dongjae LEE , Kyongho HONG
CPC classification number: H01L51/56 , C23C14/042
Abstract: A mask stage includes plates disposed adjacent to each other, the plates forming a closed loop in a plan view, and a connection portion connecting adjacent ones among the plates to each other, the connection portion being detachable from the plates. The mask stage supports a mask frame.
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