公开(公告)号：US20230147723A1

公开(公告)日：2023-05-11

申请号：US17894625

申请日：2022-08-24

Applicant: Samsung Display Co., LTD.

Inventor： Kyongho HONG ,  Myungkyu KIM ,  Chang-Kon PARK ,  Sukbeom YOU ,  Dongjae LEE

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A loading apparatus for a deposition mask includes a clamper that clamps the mask extending in a direction, a first adsorption part, a second adsorption part, and a connection part connected to the first adsorption part and the second adsorption part, and includes a picker that transfers the mask. In case that the picker transfers the mask, the first adsorption part adsorbs ends of the mask, the second adsorption unit adsorbs a portion between the ends of the mask, and the clamper clamps the mask between the first adsorption part and the second adsorption part.

公开(公告)号：US20230189625A1

公开(公告)日：2023-06-15

申请号：US18079966

申请日：2022-12-13

Applicant: Samsung Display Co., Ltd.

Inventor： Myungkyu KIM ,  Changkon PARK ,  Sukbeom YOU ,  Dongjae LEE ,  Kyongho HONG

IPC: H10K71/00 ,  C23C14/04

CPC classification number: H01L51/56 ,  C23C14/042

Abstract: A mask stage includes plates disposed adjacent to each other, the plates forming a closed loop in a plan view, and a connection portion connecting adjacent ones among the plates to each other, the connection portion being detachable from the plates. The mask stage supports a mask frame.

公开(公告)号：US20190247954A1

公开(公告)日：2019-08-15

申请号：US16191575

申请日：2018-11-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jaebum PAHK ,  Jeongho YI ,  Dokyun KWON ,  Kyongho HONG ,  Jihun KANG ,  Cheollae ROH ,  Gyoowan HAN

IPC: B23K26/142 ,  B23K26/14

CPC classification number: B23K26/142 ,  B23K26/1476 ,  B23K2101/36

Abstract: A particle removal device includes: a stage on which a target substrate is disposed; an inner case defining a first discharge opening through which the stage is exposed to an internal space of the inner case; an outer case including: a side wall portion surrounding the inner case, a protrusion portion protruded from the side wall portion toward the inner case, and a second discharge opening in fluid connection with the first discharge opening; a suction pump connected to the second discharge opening; an air injector in fluid connection with the internal space; and an intake opening in fluid connection with the first and second discharge openings. A width of the intake opening as a distance between the distal end of the inner case and the distal end of the protrusion portion is smaller than a width of the first discharge opening.

公开(公告)号：US20230161242A1

公开(公告)日：2023-05-25

申请号：US17865027

申请日：2022-07-14

Applicant: Samsung Display Co., LTD.

Inventor： Suk Beom YOU ,  Kyongho HONG ,  Myungkyu KIM ,  Chang-Kon PARK ,  Dongjae LEE

IPC: G03F1/64

CPC classification number: G03F1/64 ,  H01L51/56

Abstract: A mask assembly according to an embodiment includes a support frame including at least four sides, a first frame disposed on the support frame and extending in a first direction, a second frame disposed on the support frame and extending in a second direction intersecting the first direction, and a mask sheet disposed on the support frame and including at least one opening. At least a side of the support frame includes a first protruding portion disposed at a first edge of the side, a second protruding portion disposed at a second edge of the side, and a recess portion disposed between the first protruding portion and the second protruding portion.

公开(公告)号：US20190217427A1

公开(公告)日：2019-07-18

申请号：US16248505

申请日：2019-01-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kyongho HONG ,  Jinwon BAEK ,  Jeongho YI ,  Jinpyung LEE

IPC: B23K37/04 ,  B23K26/38 ,  B25B11/00

CPC classification number: B23K37/0408 ,  B23K26/38 ,  B23K2101/40 ,  B25B11/005

Abstract: A stage for cutting a substrate includes: a body member; a plurality of first discharging members, each including a first suction portion in the body member and a first partition wall portion connected to the first suction portion and protruding from a top surface of the body member, each of the first discharging members defining a first space connected to an outside; a plurality of second discharging members, each including a second suction portion in the body member and a second partition wall portion connected to the second suction portion and protruding from the top surface of the body member, each of the second discharging members defining a second space connected to the outside; a plurality of connecting pipes each connected to the first partition wall portion and the second partition wall portion; and a plurality of supply pipes connected to the connecting pipes.

公开(公告)号：US20190217414A1

公开(公告)日：2019-07-18

申请号：US16249533

申请日：2019-01-16

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kyongho HONG ,  Dokyun KWON ,  Seokjoo LEE ,  Jeongho YI

IPC: B23K26/142 ,  B08B5/04

CPC classification number: B23K26/142 ,  B08B5/04

Abstract: A laser apparatus including a stage. A target substrate is mounted on the stage. The laser apparatus further includes a coupling unit disposed below the stage and coupled with a conveying unit, the conveying unit conveying the stage. The laser apparatus additionally includes a discharge unit disposed at a predetermined position for laser machining, configured to communicate with the coupling unit when docked with the coupling unit, and configured to discharge foreign matter that is generated during laser machining.