公开(公告)号：US20140291514A1

公开(公告)日：2014-10-02

申请号：US14199906

申请日：2014-03-06

Applicant: Samsung Display Co., Ltd.

Inventor： Dong-Hyun GONG ,  Young-Gil PARK ,  Jae-Kwon LEE ,  Jung-Un KIM ,  Do-Soon JUNG ,  Hyun-Jung KIM ,  Geum-Tae KIM

IPC: H01J37/26 ,  G01N21/88

CPC classification number: G01N21/88 ,  G01N21/95 ,  G01N2021/9513 ,  G01N2223/418 ,  H01J37/28 ,  H01J2237/2605 ,  H01J2237/2811

Abstract: An inspection system includes: an automated optical inspection device detecting a defect of an inspection object by using a light; a scanning electron microscope device for inspecting the defect of the inspection object by using an electron beam and including a vacuum chamber; a stage positioned below and spaced from the scanning electron microscope device and supporting the inspection object; and a transferring device connected to the scanning electron microscope chamber and the automated optical inspection and transferring the scanning electron microscope device and the automated optical inspection device to positions over the stage. Air is in a gap between the chamber and the inspection object. Accordingly, an inspection object of a large size may be inspected for analysis without damage to the inspection object.

Abstract translation: 检查系统包括：通过使用光检测检查对象的缺陷的自动光学检查装置; 用于通过使用电子束并包括真空室来检查检查对象的缺陷的扫描电子显微镜装置; 位于扫描电子显微镜装置下方并与扫描电子显微镜装置隔开并支撑检查对象的台阶; 以及连接到扫描电子显微镜室的转移装置以及扫描电子显微镜装置和自动光学检查装置的自动光学检查和转移到载物台上的位置。 空气处于室和检查对象之间的间隙。 因此，可以对大尺寸的检查对象进行检查，而不会损害检查对象。