公开(公告)号：US20140307080A1

公开(公告)日：2014-10-16

申请号：US14056191

申请日：2013-10-17

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Ki-Hyun KIM ,  Young-Gil PARK ,  Shang-U KIM ,  Ki-Won OH

IPC: G01N21/95

CPC classification number: G01N21/95 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8848

Abstract: A sample inspection apparatus is provided. A sample inspection apparatus according to an exemplary embodiment of the present invention includes a base; a loading portion installed on the base so that a sample is placed thereon; a first light source radiating light on the sample, the sample being placed on the loading portion; a first light receiving portion located at a first position and receiving light reflected and scattered by the sample; and a support portion positioned on the loading portion so that the first light source and the first light receiving portion are movably installed on the support portion.

Abstract translation: 提供样品检查装置。 根据本发明的示例性实施例的样本检查装置包括基座; 安装在基座上的装载部分，使样品放置在其上; 在样品上照射光的第一光源，样品被放置在装载部分上; 第一光接收部分，位于第一位置并接收被样品反射和散射的光; 以及支撑部，其位于所述装载部上，使得所述第一光源和所述第一光接收部可移动地安装在所述支撑部上。

公开(公告)号：US20150034454A1

公开(公告)日：2015-02-05

申请号：US14450439

申请日：2014-08-04

Applicant: Samsung Display Co., Ltd.

Inventor： Soon-Ju PARK ,  Sung-Hun KIM ,  Yoon-Won KIM ,  Young-Gil PARK ,  Jung-Ho PARK ,  Mun-Gu BAEK ,  Young-Bok YOON ,  Sung-Soo LEE ,  Byoung-Yun JOO ,  Bong-Soo CHOI

IPC: B65G37/00 ,  B65G13/00

CPC classification number: B65G39/12 ,  B65G49/064 ,  H01L21/67706

Abstract: A substrate transferring apparatus includes a first conveyer line assembly which transfers a substrate in a first direction, and includes a first base frame extending along the first direction, first and second pulleys respectively disposed at both end parts of the first base frame in the first direction, and a conveyer belt disposed on the first base frame, and driven by the first and second pulleys, and a first roller line assembly spaced apart from the first conveyer line assembly in a second direction which is substantially perpendicular to the first direction, and including a second base frame extending along the first direction, and a first roller part connected to the second base frame and including a plurality of rollers which contacts to the substrate.

Abstract translation: 基板转印装置包括：沿第一方向转移基板的第一输送线组件，并且包括沿着第一方向延伸的第一基架;第一和第二滑轮，分别设置在第一基架的第一方向的两端部 以及设置在所述第一基座框架上并由所述第一和第二滑轮驱动的输送带以及与所述第一输送线组件在基本上垂直于所述第一方向的第二方向间隔开的第一辊线组件，并且包括 沿着第一方向延伸的第二基架，以及连接到第二基架的第一辊部，并且包括与基板接触的多个辊。

公开(公告)号：US20140291514A1

公开(公告)日：2014-10-02

申请号：US14199906

申请日：2014-03-06

Applicant: Samsung Display Co., Ltd.

Inventor： Dong-Hyun GONG ,  Young-Gil PARK ,  Jae-Kwon LEE ,  Jung-Un KIM ,  Do-Soon JUNG ,  Hyun-Jung KIM ,  Geum-Tae KIM

IPC: H01J37/26 ,  G01N21/88

CPC classification number: G01N21/88 ,  G01N21/95 ,  G01N2021/9513 ,  G01N2223/418 ,  H01J37/28 ,  H01J2237/2605 ,  H01J2237/2811

Abstract: An inspection system includes: an automated optical inspection device detecting a defect of an inspection object by using a light; a scanning electron microscope device for inspecting the defect of the inspection object by using an electron beam and including a vacuum chamber; a stage positioned below and spaced from the scanning electron microscope device and supporting the inspection object; and a transferring device connected to the scanning electron microscope chamber and the automated optical inspection and transferring the scanning electron microscope device and the automated optical inspection device to positions over the stage. Air is in a gap between the chamber and the inspection object. Accordingly, an inspection object of a large size may be inspected for analysis without damage to the inspection object.

Abstract translation: 检查系统包括：通过使用光检测检查对象的缺陷的自动光学检查装置; 用于通过使用电子束并包括真空室来检查检查对象的缺陷的扫描电子显微镜装置; 位于扫描电子显微镜装置下方并与扫描电子显微镜装置隔开并支撑检查对象的台阶; 以及连接到扫描电子显微镜室的转移装置以及扫描电子显微镜装置和自动光学检查装置的自动光学检查和转移到载物台上的位置。 空气处于室和检查对象之间的间隙。 因此，可以对大尺寸的检查对象进行检查，而不会损害检查对象。