公开(公告)号：US20230407452A1

公开(公告)日：2023-12-21

申请号：US18314231

申请日：2023-05-09

Applicant: Samsung Display Co., Ltd.

Inventor： JAEMIN HONG ,  HYOUNGWOOK KIM ,  SEONGCHEOL LEE

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A deposition apparatus and a deposition method by using the deposition apparatus are provided. The deposition apparatus includes a mask including deposition openings, a mask frame supporting the mask and including first, second, third, and fourth portions and an opening overlapping the deposition openings and surrounded by the first, second, third, and fourth portions, a stage disposed on a rear surface of the mask frame, a pin unit connected to the stage, and a magnet unit disposed on a rear surface of the stage and overlapping the mask frame. The first portion and the second portion of the mask frame extend in a first direction, and the third portion and the fourth portion of the mask frame extend in a second direction intersecting the first direction, and the pin unit supports a side surface of the first portion of the mask frame and is movable in the second direction.