公开(公告)号：US20230407452A1

公开(公告)日：2023-12-21

申请号：US18314231

申请日：2023-05-09

Applicant: Samsung Display Co., Ltd.

Inventor： JAEMIN HONG ,  HYOUNGWOOK KIM ,  SEONGCHEOL LEE

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A deposition apparatus and a deposition method by using the deposition apparatus are provided. The deposition apparatus includes a mask including deposition openings, a mask frame supporting the mask and including first, second, third, and fourth portions and an opening overlapping the deposition openings and surrounded by the first, second, third, and fourth portions, a stage disposed on a rear surface of the mask frame, a pin unit connected to the stage, and a magnet unit disposed on a rear surface of the stage and overlapping the mask frame. The first portion and the second portion of the mask frame extend in a first direction, and the third portion and the fourth portion of the mask frame extend in a second direction intersecting the first direction, and the pin unit supports a side surface of the first portion of the mask frame and is movable in the second direction.

公开(公告)号：US20230227961A1

公开(公告)日：2023-07-20

申请号：US18076487

申请日：2022-12-07

Applicant: Samsung Display Co., Ltd.

Inventor： JAEMIN HONG ,  SUNG JIN NA ,  HEESEAK NOH ,  SEONGCHEOL LEE

IPC: C23C14/04 ,  H10K71/16 ,  H10K71/00

CPC classification number: C23C14/042 ,  H01L51/0011 ,  H01L51/56

Abstract: A mask assembly includes a frame including long side portions extending in a first direction and spaced apart from each other in a second direction intersecting the first direction, and short side portions connected to the long side portions, the frame defining a frame opening, a first stick extending in the second direction and connected to the frame, a first mask sheet defining first deposition openings and connected to the first stick and the frame, at least part of the first deposition openings arranged in the first direction and overlapping the frame opening in a plan view, and a second mask sheet defining second deposition openings and connected to the first stick and the frame, at least part of the second mask sheet arranged in the first direction and overlapping the frame opening in a plan view.