公开(公告)号：US20230358612A1

公开(公告)日：2023-11-09

申请号：US18105575

申请日：2023-02-03

Applicant: Samsung Display Co., Ltd.

Inventor： JOOYOUNG YOON ,  YUNSEOK HAN ,  DOWON YI ,  JOO-YOUNG LEE ,  HYUN-KOO LEE

IPC: G01J3/45 ,  G01J3/02

CPC classification number: G01J3/45 ,  G01J3/021

Abstract: An apparatus for inspecting a display panel includes a light source, a half mirror reflecting a first beam which is a portion of a source beam irradiated from the light source and transmitting a second beam which is another portion of the source beam toward a display panel, a reflective mirror reflecting the second beam transmitting the half mirror and the display panel to return to the half mirror, a panel supporter supporting the display panel between the half mirror and the reflective mirror, a wave plate disposed between the half mirror and the reflective mirror and transmitting the second beam, a rotator rotating the wave plate at a predetermined angle and an imaging detector photographing an interference fringe by the first beam and the second beam.